Design and Simulation of MEMS Piezoresistive Pressure Sensor to Improve the Sensitivity

Abstract: The Piezoresistive pressure sensor presented in this paper describes the optimum techniques to improve the performance of the sensor. Finite element analysis is applied as a part to the design to obtain the results approximately to that of theoretical values. The simulation is carried out considering the membrane geometry size, shape and location of piezoresistors. The applied pressure is transformed into voltage by the piezoresistors which are connected in the form of Wheatstone bridge. The sensitivity of the sensor can be enhanced by selecting proper membrane geometry and the piezoresistors location and in the same way the results are obtained.

Keywords: Piezoresistors, MEMS, Piezoresistivity, Pressure sensor.