Improvements for High-Precision Differential Microscopy Technique Based on Position Sensitive Detectors

Abstract: A microscopy system has been introduced based on a Position Sensitive Detector (PSD). In our previous research, the geometric error factors that are caused by the pincushion-type distortion of these sensors were investigated and were addressed to significantly reduce Signal to Noise Ratio (SNR) in PSD and the microscopy system. The algorithm used for the microscopy system can be also further improved to achieve a high-precision system based on localized differential method. This approach was implemented in this research resulting in significant improvement in the precision of the microscopy system.

Keywords: Position Sensitive Detector; Localized differential method; Microscopy systems; PSD; Sensor calibration