The Design of a New Linear MEMS Variable Inductor

Abstract: In this paper, we introduce a new structure of linear MEMS variable inductor which can be tuned using CCT method and we use a reticulated plate to varies the inductance. One of the advantages of this structure is a light weight relative to the integrated upper plate. The proposed structure consists of an inductor, movable ring plate and an electrostatic actuator system. In our tunable inductor, the electrostatic actuator is employed for mechanical movement. The simulation results show that, the minimum and maximum tuning range of our tuning inductor is 53% and 79% respectively and we have the linear change in inductance.

Keywords: MEMS, Variable Inductor, electrostatic actuator